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Butt-Coupling Optical Probe Card for Wafer-Scale Photonic-Integrated-Circuits Test with Polarization Control
Wafer-scale Si photonics testing through grating couplers has a great progress nowadays. Together with an image processing technique, a fully automated wafer-scale testing platform has been demonstrated. However, most of the devices are eventually diced and packaged with fiber arrays through edge coupling. Therefore, high-speed, on-wafer testing of device… Read More