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MEMS & Sensors Packaging

Micro-Electro-Mechanical Systems (MEMS) and sensors are the essential enabling components that allow people to experience and interact with the world in revolutionary new ways. MEMS devices consist of mechanical elements, sensing features, and electronic circuits integrated onto a common silicon substrate. The elements in MEMS gather information from the environment through the measurement of mechanical, thermal, biological, chemical, acoustic, optical, and magnetic stimuli. Wafer level packaging and TSV technologies are key enabling technologies that optimize size, functionality, performance as well as deliver cost effective integration for MEMS packaging. ASE offers extensive modeling lab capabilities, including optical lab simulation and measurement, as well as expertise in material measurement and stress simulation, which are all areas of extreme importance to MEMS & Sensor manufacturing.



Application
Features

MEMS and sensor's markets are mainly driven by the strong demands from mobile, automotive, and medical applications.

Inertial
  • Gyroscope
  • Accelerometer
  • Magnetometer/Hall Effect
  • Combo & IMU
Light & Radiations
  • X-ray Sensor
  • µ-bolometer
  • IR Sensor
  • IR Thermopile
  • UV Sensor
  • PALS/ALS
RF
  • Oscillators
  • Switches
  • SAW
  • FBAR/BAW
Environmental
  • TPMS Module
  • Gas Sensor
  • Pressure Sensor
  • Temperature Sensor
  • Humidity Sensor
  • Si µphone
Others
  • Optical/µ-mirror
  • LED
  • IJ Head
  • Small size, mass volume
  • Low power consumption
  • Low cost
  • Easy to integrate into systems or modify